[29p-G16-1~21] 15.8 Crystal evaluation, nanoimpurities and crystal defects

[29p-G16-7] High sensitivity infrared absorption spectroscopy and infrared defect dynamics of silicon crystal (5) Quantitative analysis of irradiation and annealing of carbon-rich sample

^○Naohisa Inoue¹, Yasunori Goto², Hirofumi Seki³, Kaori Watanabe⁴, Yuichi Kawamura⁵ (Tokyo Univ. Agr. & Technol.¹, Toyota Motor Co.², Toray Research Center³, Systems Engineering Inc.⁴, Osaka Pref. Univ.⁵)

Keywords:シリコン、粒子線照射、赤外吸収