[29p-PA1-1~17] 8. Plasma Electronics

[29p-PA1-14] N2 Plasma Etching Damage on n-GaN Surface (8.4)

^○Masahito Niibe¹, Retsuo Kawakami², Yoshitaka Nakano³, Masashi Konishi², Yuta Mori², Takuya Kotaka¹, Tatsuo Shirahama², Tetsuya Yamada², Kikuo Tominaga², Takashi Mukai⁴ (Univ. Hyogo¹, Univ. Tokushima², Chubu Univ.³, Nichia Corp.⁴)

Keywords:プラズマエッチング、モデリング、表面分析