[29p-PA4-1~11] 22.1Joint Session L "Basics and applications of MEMS, NEMS: Integration of diverse functionalities"

[29p-PA4-1] Fabrication and characterization of nanomechanical resonator for wavelength detection

^○Reo Kometani¹, Hui Liu¹, Shinichi Warisawa¹, Sunao Ishihara¹ (Univ. of Tokyo¹)

Keywords:振動子