[29p-PA4-1~11] 22.1Joint Session L "Basics and applications of MEMS, NEMS: Integration of diverse functionalities"

[29p-PA4-5] A Design of Arrayed MEMS Accelerometers

^○Toshifumi Konishi¹, Daisuke Yamane², Gou Motohashi², Ken Kagaya², Takaaki Matushisma¹, Hiroyuki Ito², Noboru Ishihara², Hiroshi Toshiyoshi³, Katsuyuki Machida^1,2, Kazuya Masu² (NTT-AT¹, Tokyo Tech², Univ. of Tokyo³)

Keywords:MEMS、加速度センサ、シミュレーション