[29p-PA4-1~11] 22.1Joint Session L "Basics and applications of MEMS, NEMS: Integration of diverse functionalities"

[29p-PA4-6] A Study on Arrayed MEMS Accelerometers

^○Daisuke Yamane¹, Toshifumi Konishi², Takaaki Matsushima², Gou Motohashi¹, Ken Kagaya¹, Hiroyuki Ito¹, Noboru Ishihara¹, Hiroshi Toshiyoshi³, Katsuyuki Machida^1,2, Kazuya Masu¹ (Tokyo Inst. of Tech.¹, NTT Advanced Tech. Corp.², The Univ. of Tokyo³)

Keywords:MEMS、アレイ、加速度センサ