[29p-PA9-1~23] 16.3 シリコン系太陽電池

[29p-PA9-11] ▲Detailed Study on the c-Si Surface Passivation Mechanism of O3-Based Batch Atomic Layer Deposited AlOx for Solar Cell Applications (4:00 PM ～ 6:00 PM)

^○Hyunju Lee^1,4，立花福久^1,4，池野成裕^1,4，橋口裕樹^1,4，土屋佑樹^1,4，新船幸二^2,4，吉田晴彦^2,4，佐藤真一^2,4，知京豊裕³，小椋厚志^1,4 (明大¹，兵庫県立大²，物質・材料研究機構³，JST-CREST⁴)

キーワード：Aluminum oxide surface passivation、Atomic layer deposition、Silicon solar cell