[29p-PA9-1~23] 16.3 Bulk, thin-film and other silicon-based solar cells

[29p-PA9-12] Effect of Initial Oxidized Layer Condition on Passivation Quality of AlOx films Deposited by Atomic Layer Deposition Technique at Room Temperature

^○Chikako Sakai^1,3, Syunsuke Yamamoto^1,3, Shohei Miki^1,3, Koji Arafune^1,3, Yasushi Hotta^1,3, Haruhiko Yoshida^1,3, Atsushi Ogura^2,3, Shin-ichi Satoh^1,3 (University of Hyogo¹, Meiji University², JST-CREST³)

Keywords:パッシベーション、結晶シリコン太陽電池、酸化アルミニウム