[29p-PB1-1~20] 13.3 Insulator technology

[29p-PB1-2] Penetration of water and hydrogen halide molecules into SiN films with defects

^○Tomoki Oku¹, Toshihiko Shiga¹, Masahiro Totsuka¹, Masayoshi Takemi¹ (Mitsubisi Electric Corp.¹)

Keywords:シリコン窒化膜、耐湿性、ハロゲン化水素