[29p-PB1-1~20] 13.3 Insulator technology

[29p-PB1-7] A Study on Introduction of SiN Interface Layer to Fabrication of high-k on Si and Ge

^○Shimpei Tachikawa¹, Yuya Nakatani¹, Yoshitaka Iwazaki¹, Tomo Ueno¹ (Tokyo Univ. of Agri. & Tech¹)

Keywords:半導体