The 60th JSAP Spring Meeting,2013

Presentation information

Regular sessions(Poster presentation)

13. Semiconductors A (Silicon) » 13.7 Simulation

[29p-PB3-1~6] 13.7 Simulation

Fri. Mar 29, 2013 1:30 PM - 3:30 PM PB3 (2nd gymnasium)

[29p-PB3-6] Effect of dislocation accumulation in STI type ULSI cells on their electric characteristics(2)

○(M1)Kenta Shimada1, Yasuhiro Shiraki1, Takuya Maruizumi1, Koichi Hayakawa1, Yosuke Takahashi2, Mitsuhiro Sato2, Ken Yamaguchi3 (Tokyo City Univ.1, Kitami Institute of Tech.2, Advance Soft3)

Keywords:半導体、転位、シミュレーション