[29p-PB4-1~25] 15.6 IV-group-based compounds

[29p-PB4-10] 4H-SiC Thermal Oxidation Film Reformulation by UV light and Oxygen Radical Treatments

^○Tadashi Sato¹, Shin-ichiro Kuroki¹, Seiji Ishikawa^1,2, Tomonori Maeda^1,2, Hiroshi Sezaki^1,2, Takamaro Kikkawa¹ (RNBS¹, Phenitec Semicon²)

Keywords:SiC、酸化膜