[29p-PB4-1~25] 15.6 IV-group-based compounds

[29p-PB4-24] Defects evaluation for 4H-SiC by CL imaging and fluorescence lifetime measurement

^○Tomoya Shimizu¹, Junichi Aoyama¹, Hiroki Baba¹, Shogo Awata¹, Nobuyuki Naka¹, Tomoaki Hatayama² (HORIBA, Ltd¹, NAIST²)

Keywords:CL imaging、fluorescence lifetime、SiC