[29p-PB4-5] Quantitative noncontact evaluation of SiC surface roughness by multi-laser system
Keywords:SiC、非接触、表面凹凸
Presentation information
Regular sessions(Poster presentation)
15. Crystal Engineering » 15.6 IV-group-based compounds
[29p-PB4-1~25] 15.6 IV-group-based compounds
Fri. Mar 29, 2013 1:30 PM - 3:30 PM PB4 (2nd gymnasium)