Stacking faults at 3C-SiC/Si(001) studied by aberration-corrected TEM

Jun Yamasaki

Presentation information

Regular sessions(Oral presentation)

07. Beam Technology and Nanofabrication » 7.2 Electron microscopes, evaluation, measurement and analysis

[30a-B1-1~10] 7.2 Electron microscopes, evaluation, measurement and analysis

Sat. Mar 30, 2013 9:00 AM - 11:45 AM B1 (K2 3F-1301)

[30a-B1-5] Stacking faults at 3C-SiC/Si(001) studied by aberration-corrected TEM

^○Jun Yamasaki¹, Shin Inamoto², Yuki Nomura², Atsushi Ishida², Kensuke Akiyama³, Yasuo Hirabayashi³, Nobuo Tanaka¹ (Nagoya Univ.¹, Nagoya Univ.², Kanagawa Industrial Technology Center³)

Keywords:SiC、積層欠陥、収差補正TEM

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