The 60th JSAP Spring Meeting,2013

Presentation information

Regular sessions(Oral presentation)

07. Beam Technology and Nanofabrication » 7.2 Electron microscopes, evaluation, measurement and analysis

[30a-B1-1~10] 7.2 Electron microscopes, evaluation, measurement and analysis

Sat. Mar 30, 2013 9:00 AM - 11:45 AM B1 (K2 3F-1301)

[30a-B1-4] Visualization of Semiconducting p-n Junction by Newly-Developed Phase Imaging Method Based on Electron Diffraction Pattern

Jun Yamasaki1, Keisuke Ohta2, Shigeyuki Morishita2, Hirokazu Sasaki3, Nobuo Tanaka1 (Nagoya Univ.1, Nagoya Univ.2, Furukawa Electric Co., Ltd.3)

Keywords:回折顕微法、位相イメージング、p-n接合