[30a-B1-1~10] 7.2 Electron microscopes, evaluation, measurement and analysis

[30a-B1-3] Characteristics of an Optical Fiber Array Detector in the STEM

^○Takafumi Ishida¹, Tetsuji Kodama¹, Tadahiro Kawasaki², Keiko Ogai³, Takashi Ikuta⁴ (Meijo Univ.¹, Nagoya Univ.², APCO Ltd.³, Osaka Electro-Communication Univ.⁴)

Keywords:位相計測、検出器、STEM