Discharging characteristics of insulating film irradiated by electron beam

Presentation information

Regular sessions(Oral presentation)

07. Beam Technology and Nanofabrication » 7.2 Electron microscopes, evaluation, measurement and analysis

Sat. Mar 30, 2013 9:00 AM - 11:45 AM B1 (K2 3F-1301)

^○（B）Kentaro Kumagai¹, Suguru Ootani¹, Yasuhiro Ohara¹, Masatoshi Kotera¹ (Osaka Inst.¹)

Keywords:電子ビーム