[30a-G6-1~11] 13.4 Interconnection technology

[30a-G6-7] Properties of HfN_x films as a barrier material for TSV interconnects

^○Masaru Sato¹, Mayumi Takeyama¹, Atsushi Noya¹ (Kitami Inst. of Technol.¹)

Keywords:バリヤ