[30p-G6-1~6] 13.4 Interconnection technology

[30p-G6-2] ▲Formation of Highly Pure Nickel Films by Hot-wire-assisted ALD

^○Guangjie Yuan¹, Hideharu Shimizu¹, Takeshi Momose¹, Yukihiro Shimogaki¹ (The Univ. of Tokyo¹)

Keywords:deposition、Ni、Hot Wire