[30p-G6-1~6] 13.4 Interconnection technology

[30p-G6-3] Reaction analysis of Co-CVD process using Co amidinate precursor for liner layer application

^○Yudai Suzuki¹, Hideharu Shimizu¹, Takeshi Momose¹, Yukihiro Shimogaki¹ (The Univ. of Tokyo¹)

Keywords:コバルト、アミディネート、コバルトCVD