[17a-C5-1~10] 15.4 III-V-group nitride crystals

[17a-C5-5] Influence of mono-layer Graphene on growth process of GaN on mono-layer Graphene/SiO2-film/Si(001) substrate by ECR-MBE method (II)

^○Tokuo Yodo¹, Nan Yang¹, Tomoaki Ishikawa¹, Satoru Kaneko^3,2, Daishi Shiojiri², Akifumi Matsuda², Mamoru Yoshimoto² (Osaka Inst. of Tech.¹, Tokyo Inst. of Tech.², Kanagawa Ind. Tech. Center³)

Keywords:グラフェン,GaN