[17a-PA3-1~7] 13.4 Devices/Integration Technologies

[17a-PA3-6] Influences of Surface Roughness and Impurity Scatterings in Junctionless Transistors

^○Masato Ichii¹, Hideaki Tsuchiya^1,3, Yoshinari Kamakura^2,3, Nobuya Mori^2,3, Matsuto Ogawa¹ (Kove Univ.¹, Osaka Univ.², JST CREST³)

Keywords:ジャンクションレストランジスタ,表面ラフネス散乱,不純物散乱