9:30 AM - 11:30 AM
[17a-PB4-10] High deposition rate of microcrystalline silicon films (μc-Si) by non-equilibrium plasma CVD
Keywords:微結晶シリコン,高速成膜,プラズマ
Presentation information
Poster presentation
16. Amorphous and Microcrystalline Materials » 16.3 Bulk, thin-film and other silicon-based solar cells
[17a-PB4-1~21] 16.3 Bulk, thin-film and other silicon-based solar cells
Wed. Sep 17, 2014 9:30 AM - 11:30 AM PB4 (Gymnasium2)
ポスター掲示時間9:30～11:30(PB4会場)