The 75th JSAP Autumn Meeting, 2014

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Poster presentation

16. Amorphous and Microcrystalline Materials » 16.3 Bulk, thin-film and other silicon-based solar cells

[17a-PB4-1~21] 16.3 Bulk, thin-film and other silicon-based solar cells

Wed. Sep 17, 2014 9:30 AM - 11:30 AM PB4 (Gymnasium2)

ポスター掲示時間9:30～11:30(PB4会場)

9:30 AM - 11:30 AM

[17a-PB4-9] Study on the high rate deposition of a-Si:H for a solar cell and the annealing condition for high quality thin film

○Yuuki Okada1, Shizuma Kuribayashi1, Hiroshi Muta1, Satoshi Nishida1 (Gifu Univ.1)

Keywords:高速成膜