[17a-S10-1~11] 8. Plasma Electronics English session

▼ [17a-S10-5] Characteristics of cluster eliminating filter for plasma CVD

^○Yoshihiro Torigoe¹, Susumu Toko¹, Weiting Chen¹, Daisuke Yamashita¹, Hyunwoong Seo¹, Kunihiro Kamataki¹, Kazunori Koga¹, Masaharu Shiratani¹ (Kyushu Univ.¹)

Keywords:水素化アモルファスシリコン