Fabrication of Wurtzite (Al,Ti)N Thin Film Thermistor with Sputtering Method

Presentation information

Oral presentation

06. Thin Films and Surfaces » 6.4 New thin-film materials

Wed. Sep 17, 2014 1:15 PM - 6:00 PM A11 (E215)

5:00 PM - 5:15 PM

^○Noriaki Nagatomo¹, Hitoshi Inaba¹, Hiroshi Tanaka¹, Toshiaki Fujita¹, Kazuta Takeshima¹, Fumio Matsumoto¹, Kunio Yamaguchi¹ (Mitsubishi Materials¹)

Keywords:窒化物,thermistor