The 75th JSAP Autumn Meeting, 2014

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Oral presentation

06. Thin Films and Surfaces » 6.4 New thin-film materials

[17p-A11-1~17] 6.4 New thin-film materials

Wed. Sep 17, 2014 1:15 PM - 6:00 PM A11 (E215)

4:45 PM - 5:00 PM

[17p-A11-13] Effect of the Sputter-deposition Conditions of Upper Electrode Films in OLED

○Yoichi Hoshi1, Daichi Hamaguchi1, Shin-ichi Kobayashi1, Takayuki Uchida1, Hidehiko Shimizu2 (Tokyo Polytechnic Univ.1, Niigata Univ.2)

Keywords:有機EL,低ダメージスパッタ堆積,電極膜