The 75th JSAP Autumn Meeting, 2014

Presentation information

Oral presentation

06. Thin Films and Surfaces » 6.4 New thin-film materials

[17p-A11-1~17] 6.4 New thin-film materials

Wed. Sep 17, 2014 1:15 PM - 6:00 PM A11 (E215)

3:15 PM - 3:30 PM

[17p-A11-8] Synthesis of SrO films with various carrier gases by atmospheric chemical vapor deposition

○(P)Keiji Komatsu1, Shigeo Ohshio1, Ikumi Toda1, Hidetoshi Saitoh1 (Nagaoka Univ. Tech.1)

Keywords:SrO,大気開放型化学気相析出法,キャリアガス種