[17p-A11-1~17] 6.4 New thin-film materials

[17p-A11-9] Evaluation of Pr oxide thin films structure on Si deposited by sputtering method

^○Kenta Hara¹, Kenta Kumagai¹, Yutaro Haraguchi¹, Setsu Suzuki², Keiji Ishibashi², Yasuhiro Yamamoto¹ (Hosei Univ.¹, Comet Inc.²)

Keywords:半導体