The 75th JSAP Autumn Meeting, 2014

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Oral presentation

06. Thin Films and Surfaces » 6.4 New thin-film materials

[17p-A11-1~17] 6.4 New thin-film materials

Wed. Sep 17, 2014 1:15 PM - 6:00 PM A11 (E215)

3:45 PM - 4:00 PM

[17p-A11-10] Characterization of Al doped CeO2 thin films deposited by O2 introduced Ar sputtering

○Notani Yuki1, Hara Kenta1, Osawa Takashi1, Aoki Kazuya1, Fujiyama Keita1, Suzuki Setsu2, Ishibashi Keiji2, Yamamoto Yasuhiro1 (Hosei Univ.1, Comet Inc.2)

Keywords:CeO2,スパッタリング,特性評価