Preparation of Sr2SiO4 thin films on Si substrates by PLD using a Sr2SiO4 polycrystalline target

Keiji Imanishi

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Oral presentation

06. Thin Films and Surfaces » 6.4 New thin-film materials

[17p-A11-1~17] 6.4 New thin-film materials

Wed. Sep 17, 2014 1:15 PM - 6:00 PM A11 (E215)

4:00 PM - 4:15 PM

[17p-A11-11] Preparation of Sr₂SiO₄ thin films on Si substrates by PLD using a Sr₂SiO₄ polycrystalline target

^○(M1)Keiji Imanishi¹, Shota Taniwaki¹, Yasushi Hotta^1,3, Haruhiko Yoshida^1,3, Koji Arafune^1,3, Atsushi Ogura^2,3, Shin-ichi Satoh^1,3 (Univ. of Hyogo¹, Meiji Univ.², JST-CREST³)

Keywords:Sr2SiO4

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Presentation information

[17p-A11-1~17] 6.4 New thin-film materials

[17p-A11-11] Preparation of Sr2SiO4 thin films on Si substrates by PLD using a Sr2SiO4 polycrystalline target

[17p-A11-11] Preparation of Sr₂SiO₄ thin films on Si substrates by PLD using a Sr₂SiO₄ polycrystalline target