[17p-A13-1~6] Phase problem in the analysis of buried interfaces by X-ray reflectivity andsurface X-ray scattering - Towards new research with coherent light sources

▲ [17p-A13-2] Tomographic Micro-Imaging of Buried Layers and Interfaces with 15W X-ray Power Source

^〇(D)Jinxing Jiang^1,2, Kenji Sakurai^1,2 (University of Tsukuba¹, National Institute for Materials Science²)

Keywords:X-ray reflection, Tomography, Buried layers and interface, Imaging