Effect of viscoelasiticity of PVA brush on the friction

Presentation information

Symposium

Symposium » Interfacial nano electrochemistry: Research frontiers of semiconductor wetprocesses

Wed. Sep 17, 2014 1:30 PM - 5:30 PM A14 (E305)

2:45 PM - 3:00 PM

^○Toshiyuki Sanada¹, Yoshitaka Hara¹, Akira Fukunaga², Hirokuni Hiyama² (Shizuoka Univ.¹, Ebara Coap.²)

Keywords:半導体洗浄