The 75th JSAP Autumn Meeting, 2014

Presentation information

Symposium

Symposium » Interfacial nano electrochemistry: Research frontiers of semiconductor wetprocesses

[17p-A14-1~12] Interfacial nano electrochemistry: Research frontiers of semiconductor wetprocesses

Wed. Sep 17, 2014 1:30 PM - 5:30 PM A14 (E305)

2:15 PM - 2:45 PM

[17p-A14-3] A new approach to establish a novel standard of required qualities for cleaning processes-A necessity of collaboration with STRJ, SEMI, and INE-

Hiroshi Tomita1 (CSRD1)

Keywords:半導体,洗浄