The 75th JSAP Autumn Meeting, 2014

Presentation information

Print

Oral presentation

15. Crystal Engineering » 15.6 IV-group-based compounds

[17p-A17-1~14] 15.6 IV-group-based compounds

Wed. Sep 17, 2014 2:00 PM - 6:00 PM A17 (E308)

4:30 PM - 4:45 PM

[17p-A17-10] Gate Stack Fabrication on n-type 3C-SiC at Low Temperature

○Yusuke Yamamoto1, Ryosuke Murayama1, Keisuke Yamamoto2, Dong Wang1, Hiroshi Nakashima2, Shigeomi Hishiki3, Keisuke Kawamura3 (I-Eggs Kyushu Univ1, KASTEC Kyushu Univ2, Air Water R & D Co., Ltd3)

Keywords:半導体