[17p-A8-1~17] 6.2 Carbon-based thin films

[17p-A8-8] X-ray photoelectron spectroscopy analysis of phosphorus-doped diamond films grown on misoriented (001) substrate

^○(D)Hiroyuki Kawashima^1,2,3, Hiromitsu Kato^2,3, Daisuke Takeuchi^2,3, Satoshi Yamasaki^1,2,3 (Univ. of Tsukuba¹, AIST², JST/CREST³)

Keywords:ダイヤモンド,XPS,オフ角