3:00 PM - 3:15 PM
[17p-A8-7] Temperature-dependent efficiency of phosphorus incorporation in MPCVD diamond
Keywords:n型ダイヤモンド半導体,マイクロ波プラズマ化学気相堆積法
Presentation information
Oral presentation
06. Thin Films and Surfaces » 6.2 Carbon-based thin films
[17p-A8-1~17] 6.2 Carbon-based thin films
Wed. Sep 17, 2014 1:15 PM - 6:00 PM A8 (E207)