5:30 PM - 5:45 PM
△ [17p-C5-14] Epitaxial growth of GaN thin films by reactive sputtering
Keywords:GaN,反応性スパッタ,熱物性
Oral presentation
15. Crystal Engineering » 15.4 III-V-group nitride crystals
Wed. Sep 17, 2014 1:15 PM - 6:45 PM C5 (Open Hall)
5:30 PM - 5:45 PM
Keywords:GaN,反応性スパッタ,熱物性