The 75th JSAP Autumn Meeting, 2014

Presentation information

Oral presentation

15. Crystal Engineering » 15.4 III-V-group nitride crystals

[17p-C5-1~18] 15.4 III-V-group nitride crystals

Wed. Sep 17, 2014 1:15 PM - 6:45 PM C5 (Open Hall)

5:45 PM - 6:00 PM

[17p-C5-15] Influence of Sputtering Pressure on Surface Characteristics and Crystalline Quality of AlN Films Deposited by Pulsed DC Reactive Sputtering

○(M1)Hiroto Takeuchi1, Makoto Ohtsuka1, Hiroyuki Fukuyama1 (Tohoku Univ. IMRAM1)

Keywords:AlN,スパッタ