5:45 PM - 6:00 PM
[17p-C5-15] Influence of Sputtering Pressure on Surface Characteristics and Crystalline Quality of AlN Films Deposited by Pulsed DC Reactive Sputtering
Keywords:AlN,スパッタ
Oral presentation
15. Crystal Engineering » 15.4 III-V-group nitride crystals
Wed. Sep 17, 2014 1:15 PM - 6:45 PM C5 (Open Hall)
5:45 PM - 6:00 PM
Keywords:AlN,スパッタ