Impact of crystalline quarity of GaN template on GaN substrate by hydride vapor phase epitaxy

Presentation information

Oral presentation

15. Crystal Engineering » 15.4 III-V-group nitride crystals

Wed. Sep 17, 2014 1:15 PM - 6:45 PM C5 (Open Hall)

2:30 PM - 2:45 PM

^○Takuya Egami¹, Takeshi Yamamoto¹, Takashi Inagaki¹, Norihiro Itagaki¹, Narihito Okada¹, Kazuyuki Tadatomo¹ (Yamaguchi Univ.¹)

Keywords:ハイドライド気相成長,窒化ガリウム