[17p-C5-1~18] 15.4 III-V-group nitride crystals

[17p-C5-9] Deterioration of Homoepitaxial HVPE-AlN Suface in a High Temperature Gas Atmosphere

^○Shunsuke Tojo¹, Ryohei Tanaka¹, Toshinari Nukaga¹, Rie Togashi¹, Toru Nagashima², Toru Kinoshita², Baxter Moody³, Hisashi Murakami¹, Ramon Collazo⁴, Yoshinao Kumagai¹, Zlatko Sitar^3,4 (Tokyo University of Agriculture and Technology¹, Tokuyama Corporation², HexaTech, Inc.³, North Carolina State Univ.⁴)

Keywords:AlN,HVPE