[17p-C6-1~10] 3.13 Semiconductor optical devices

[17p-C6-2] Development of high-sensitivity SOI photodiode by high-density arrangement of gold nanoparticles

^○Atsushi Ono^1,2, Yasushi Enomoto³, Yasufumi Matsumura³, Hiroaki Satoh^1,2, Hiroshi Inokawa^1,2 (RIE, Shizuoka Univ.¹, Shizuoka Univ.², NSSC³)

Keywords:半導体,シリコン,光検出器