[18a-A16-1~11] 13.4 Devices/Integration Technologies

[18a-A16-5] Vt-tuning technology with low variability for SOTB-FinFETs by back-biasing

^○Takashi Matsukawa¹, YongXun Liu¹, Kazuhiko Endo¹, Junichi Tsukada¹, Hiromi Yamauchi¹, Yuki Ishikawa¹, Shinichi O'uchi¹, Shinji Migita¹, Yukinori Morita¹, Wataru Mizubayshi¹, Hiroyuki Ota¹, Meishoku Masahara¹ (AIST¹)

Keywords:FinFET,Vt可変技術,特性ばらつき