The 75th JSAP Autumn Meeting, 2014

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Oral presentation

15. Crystal Engineering » 15.6 IV-group-based compounds

[18a-A17-1~13] 15.6 IV-group-based compounds

Thu. Sep 18, 2014 9:00 AM - 12:30 PM A17 (E308)

10:00 AM - 10:15 AM

[18a-A17-5] Observation of pair structure of threading dislocation and nano-groove in 4H-SiC wafer by mirror projection electron microscopy

○Toshiyuki Isshiki1, Masaki Hasegawa2 (Kyoto Inst. Tech.1, Hitachi, Central Research Lab.2)

Keywords:欠陥評価,ミラー電子顕微鏡,SiC