[18a-A18-1~9] 3.15 Silicon photonics

[18a-A18-4] Reduction of N-H bond in SiON waveguide deposited by ECR-PE CVD method

^○Kota Okazaki^1,2, Hidetaka Nishi^1,2, Tai Tsuchizawa^1,2, Tsuyoshi Yamamoto², Koji Yamada^1,2 (NTT NPC¹, NTT MI Labs.²)

Keywords:シリコンフォトニクス,SiON導波路,ECRプラズマCVD法