[18a-A18-1~9] 3.15 Silicon photonics

[18a-A18-5] A Silicon Nitride Platform by Physical Vapor Deposition for Dense Wavelength Division Multiplexing on Chip

^○Ziyi Zhang¹, Motoki Yako¹, Kan Ju¹, Naoyuki Kawai¹, Tai Tsuchizawa², Koji Yamada², Hiroshi Fukuda², Kazumi Wada¹ (The University of Tokyo¹, NTT Microsystem Integration Laboratoies²)

Keywords:Silicon Nitride,DWDM