[18a-A18-1~9] 3.15 Silicon photonics

△ [18a-A18-6] An investigation into second harmonic generation by Si-rich SiNx thin films deposited by RF sputtering over a wide range of Si concentrations

^○(M1)Akihiro Kitao¹, Kenji Imakita¹, Ibuki Kawamura¹, Minoru Fujii¹ (Kobe. Univ¹)

Keywords:シリコンフォトニクス,非線形光学材料,第二次好調波