The 75th JSAP Autumn Meeting, 2014

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Oral presentation

15. Crystal Engineering » 15.4 III-V-group nitride crystals

[18a-C5-1~15] 15.4 III-V-group nitride crystals

Thu. Sep 18, 2014 8:30 AM - 12:30 PM C5 (Open Hall)

10:00 AM - 10:15 AM

[18a-C5-7] Thermal cleaning of sapphire substrates

○Chia-Hung Lin1, Shuhei Suzuki1, Shunsuke Okada1, Hideto Miyake1, Kazumasa Hiramatsu1 (Mie Univ.1)

Keywords:Thermal cleaning