[18p-A11-1~17] 6.4 薄膜新材料

▼ [18p-A11-3] Effect of oxidation process on MoS₂ thin film growth

^○Sinae Heo^1,2，Ryoma Hayakawa¹，Toyohiro Chikyow¹，Yutaka Wakayama^1,2 (NIMS¹，Kyusyu University²)

キーワード：MoS2, Thin film