The crystallinity of nano-crystalline IGZO thin films

Presentation information

Oral presentation

Joint Session K "Wide bandgap oxide semiconductor materials and devices" » Nanocarbon Technology

Thu. Sep 18, 2014 1:15 PM - 5:30 PM A12 (E301)

1:30 PM - 1:45 PM

^○Yoichi Kurosawa¹, Yusuke Nonaka¹, Noritaka Ishihara¹, Masashi Oota¹, Yoshinori Yamada¹, Shinya Nishino¹, Shunpei Yamazaki¹ (SEL¹)

Keywords:IGZO,nano-crystal,XRD